Praxair Electronics, a division of Praxair, Inc. announced recently that its UpTime® sub-atmospheric dopant gas delivery system has been selected to be the factory default standard for Applied Materials’ flagship Varian VIISta® ion implant platform.“We are pleased to offer customers Praxair’s UpTime system on our VIISta platform,” said Matt Gaucher, general manager of high current implantation at Varian Semiconductor Equipment, a division of Applied Materials, Inc. “Compared to other available options, the UpTime system has demonstrated significantly improved operational productivity on our platform.”
Ion implantation is a process used in the fabrication of microchips in which ions, created from highly specialized gases, are accelerated and implanted into silicon wafers to modify the properties of a film. With over 1,500 tools installed worldwide, the VIISta system is the industry’s leading ion implant platform. "We look forward to continuing our work with Applied in identifying and jointly bringing to market additional productivity enhancements to customers in the implant space,” added Lisa Fanti, director of electronics product commercialization at Praxair. “Applied’s adoption of UpTime for their market-leading implant platform is a validation of its advanced and cost-effective capabilities."
Praxair is also the preferred sub-atmospheric dopant supplier for the Solion™ implant tool developed by Varian Semiconductor Equipment for the solar photovoltaic market.Praxair, Inc. is the largest industrial gases company in North and South America and one of the largest worldwide, with 2011 sales of $11 billion. The company produces, sells and distributes atmospheric and process gases and high-performance surface coatings. Praxair products, services and technologies are making our planet more productive by bringing efficiency and environmental benefits to a wide variety of industries, including aerospace, chemicals, food and beverage, electronics, energy, healthcare, manufacturing, metals and others. More information on Praxair is available on the Internet at www.praxair.com.